Celerity
MFC Model: UFC-8561
Mass Flow Controller
Customer P/N: 797-026724-505
Celerity Inc.
CI2 200 sccm HOS
Unit 8560 Series
Response Speed: F
Exhaust Condition (Atmosphere or Vacuum): V
Valve Type: NC
Seal (and Seat) Material: MM
Reference Temperature and Pressure: 0C 760T
Electrical Connector Type: UDG9
Option: Auto Shutoff
Main Firmware Revision: 1.02
Fitting DWNPRT C-Seal: 750-001-B2214 001
500 PSI Max / 3,500 kPa Flow
750-001-A2343 Rev. E
Celerity Mass Flow Controllers precisely monitor and control the mass flow of gases in processes such as Plasma Etching, CVD, Diffusion, EPI, and Sputtering where superior accuracy is required. Mass Flow Meters are identical to mass flow controllers, except that they do not have a controlling valve. Therefore they do not control, but only accurately measure and report the gas flow that is passing through them.
Have some marks and scratches due to old stock.
© All the pictures are Organic and this part is physically in our stock